Indian Society for Heat and Mass Transfer
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COOLING OF MEMS DEVICES USING NANO-FLUIDS

Mangal Singh Lodhi
Mechanical Engineering Discipline, PDPM Indian Institute of Information Technology, Design and Manufacturing, Jabalpur (MP)-482005, India

Goutam Dutta
Mechanical Engineering Discipline, PDPM Indian Institute of Information Technology, Design and Manufacturing, Jabalpur-482005, Madhya Pradesh, India

Tanuja Sheorey
Mechanical Engineering Discipline, PDPM Indian Institute of Information Technology, Design and Manufacturing, Jabalpur-482005, Madhya Pradesh, India

DOI: 10.1615/IHMTC-2017.1780
pages 1287-1294

摘要

The micro-channel cooling technique appears to be a viable solution to high heat dissipation requirements of the micro-electro-mechanical system (MEMS) devices. The thermal design of these devices is a key issue that needs to keep the operating temperature at below the acceptable limit. Hence, the aim of the present work is to improve the thermal performance and reliability of these devices, by maintaining the operating temperature below the critical temperature say 85°C. The experimental study was conducted on single-phase forced convection in micro-channel using distilled water (DW) and Al2O3/water nano-fluids with two different nano-particle volume concentrations, i.e., ∅ = 0.02 and 0.025 as a coolant. The set of experiments was performed to measure the surface temperature of micro-channel using infra-red thermography (IRT) technique, at fixed volume flow rates in the range of 10−25 ml/min. It is observed that the use of nano-fluid not only reduce the maximum surface temperature, Tw,max below the critical temperature, Tcr, but also improve the uniformity of temperature distribution on the surface of MEMS devices. It is also observed that the nano-fluids also improves the cooling efficacy of micro-channel as compared to the DW as a coolant.

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