COOLING OF MEMS DEVICES USING NANO-FLUIDS
The micro-channel cooling technique appears to be a viable
solution to high heat dissipation requirements of the micro-electro-mechanical system (MEMS) devices. The thermal design
of these devices is a key issue that needs to keep the operating temperature at below the acceptable limit. Hence, the aim of the present work is to improve the thermal performance and reliability of these devices, by maintaining the operating temperature below the critical temperature say 85°C. The experimental study was conducted on single-phase forced convection in micro-channel using distilled water (DW) and Al2O3/water nano-fluids with two different nano-particle volume concentrations, i.e., ∅ = 0.02 and 0.025 as a coolant. The set of experiments
was performed to measure the surface temperature of micro-channel using infra-red thermography (IRT) technique, at
fixed volume flow rates in the range of 10−25 ml/min. It is observed that the use of nano-fluid not only reduce the maximum surface temperature, Tw,max below the critical temperature, Tcr, but also improve the uniformity of temperature distribution on the surface of MEMS devices. It is also observed that the nano-fluids also improves the cooling efficacy of micro-channel as compared to the DW as a coolant.